Project by Anwar Farhana
Microelectromechanical Systems (MEMS) membranes are widely used in various applications ranging from stiffness tuning to gas pressure sensing. Superior properties such as higher sensitivity of MEMS membranes can be utilized in water-related applications. However, lack of reliable processing, testing procedure and packaging methods leads to electrical and mechanical failures and thereby restrict their progress in water applications. In this research, a MEMS membrane device constructed using silicon-on-insulator (SOI) wafers, has been tested and packaged for the water environment. These membranes can act as a wake-up switch for a Wireless sensor network (WSN) when piezoelectric (PZE) material is integrated. In WSN for environment control, such kind of trigger switches ensures zero/ low power consumption. Thus, it can be used to maintain wakeup-sleep schedule of sensor node. Since PZE materials can generate piezoelectric voltage, the sensor will not need any driving power for operating.
Figure: Microscopic images of Back-side Processing (Membrane), above, and Front-side processing (PZR deposition), right