In this research, a MEMS membrane device constructed using silicon-on-insulator (SOI) wafers, has been tested and packaged for the water environment. These membranes can act as a wake-up switch for a Wireless sensor network (WSN) when piezoelectric (PZE) material is integrated. In WSN for environment control, such kind of trigger switches ensures zero/ low power consumption.
Opus College of Engineering
Dept. of Electrical and Computer Engineering
Engineering Hall 248
1637 W. Wisconsin Avenue
Milwaukee, WI 53233