In this project, MEMS membrane-based photo-acoustic (PA) detection system for a hazardous gas sensing application with high accuracy and low cost has been introduced. Thin and deformable micro-machined membrane is used to detect the acoustic vibration created via light-gas interaction inside the PA chamber.
A test fixture facilitates to study contact force, contact resistance, adhesion, and contamination associated with the microcontact. In this project, a novel test fixture will be developed and engineered micro-electrical contacts will be fabricated and tested using our novel test fixture for acquiring significant data to design a robust and reliable MEMS switch for future DC and RF applications.
GaN on Si is not studied much because of the cracking problem in GaN films which becomes worse at a higher temperature. Therefore, our focus is to grow the good quality and less stressed GaN films on Si, using the low-temperature atomic layer deposition (ALD) method. In the future, our plan is to design and fabricate GaN/Si devices and study their reliability, performance for industrial applications.